A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

Piezoelectric materials have attracted considerable attention over the last two decades because many technologies utilize their core properties of piezoelectric materials. Previous applications consisted bulk structures; however, a shift towards better performance and more simplified compatible fabrication method are required. Aluminum nitride (AlN) is material that fits these criteria; it has non-centrosymmetric crystal structure with polarized c-axis exhibits properties. Furthermore, an added benefit as process AIN complementary metal–oxide semiconductor technology. This led to rapid increase in adoption interest AlN-based devices. In this review, AlN its compared those aluminum scandium nitride. Subsequently, functional devices such consumer-based devices, telecommunication-based industrial-related applications, medical presented. Finally, summary discussion future research